What is the Reaction Atomization of Polysilicon Reduction Furnace

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What is the Reaction Atomization of Polysilicon Reduction Furnace

The polysilicon reduction furnace is the core equipment for the production of polysilicon, and the reaction atomization of the polysilicon reduction furnace refers to the thermal cracking reaction of chlorosilane in the reduction furnace due to the action of high temperature, resulting in fine silica powder, which forms a mist in the gas phase space in the furnace, that is, the so-called atomization phenomenon. If left unchecked, this atomization can lead to irregular particles or internal interlayers on the surface of polysilicon rods, affecting product quality.

After the atomization phenomenon occurs, there are usually parameter changes:

· The temperature of the reduction exhaust gas rises rapidly;

· Reduction voltage drops rapidly;

· The power of the reduction reaction also decreases rapidly

· The temperature of the furnace water return water rises.

There are many reasons for atomization in the polysilicon reduction furnace, including but not limited to the high surface temperature of the polysilicon rod in the reduction furnace, insufficient hydrogen flow of raw materials, insufficient total flow of raw materials, or improper silicon dichloride content. Measures that can be taken to control atomization include reducing the rod surface temperature, increasing the hydrogen flow, increasing the total feedstock flow, or controlling the content of dichlorodihydrogen silane.

The total flow rate of the material is insufficient or the content of dichlorodihydrogen silicon is improper. Measures that can be taken to control atomization include reducing the rod surface temperature, increasing the hydrogen flow, increasing the total feedstock flow, or controlling the content of dichlorodihy drogen silane.

In addition, with the deepening of the research on the optimal control of the reduction furnace, it is found that the reduction furnace can have the effect of reducing power consumption under different atomization states. To achieve a certain degree of atomization boundary card edge operation, which can not only reduce power consumption, but also ensure product quality. However, due to the lack of effective detection methods for atomization degree, the existing control strategies are difficult to achieve satisfactory results.

In order to solve this problem, a system and method for detecting the degree of atomization of polysilicon reduction reaction have been proposed, including an exhaust gas detection device and a central controller. By detecting the change of silica fume content in the exhaust gas, the system digitally monitors the degree of atomization in the furnace in real time, and the operator can adjust the parameters of the reduction furnace in time according to the detection results to achieve optimal control.

In addition, a method for detecting atomization in polysilicon reduction furnace is proposed, which measures the dust concentration value by installing a dust detector on the exhaust gas outlet pipeline, and calculates the range and variance to judge the degree of atomization in the furnace, so as to guide the operator to make adjustments. The application of these technologies helps to improve the control quality of the reduction furnace, reduce the difficulty of operation, and ensure the quality of polysilicon products.