What Is A Single Fluid Nozzle Vs A Two-Fluid Nozzle

What is a Single Fluid Nozzle vs a Two-fluid Nozzle?

What is nozzle?

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Nozzles are a key component in semiconductor wet processing equipment, which is used to disperse the solution into a spray pattern and spray it onto the surface of the wafer for chemical reaction, cleaning, etching and other purposes. It is usually divided into two types: single-fluid and two-fluid nozzles.

What is a single fluid nozzle vs a two-fluid nozzle?

Single-fluid nozzles: Only one fluid is required, and the spray effect is controlled by the change of nozzle aperture and internal design. 2. Fluid nozzle: The spray effect is achieved by mixing two different fluids (liquid medicine and nitrogen).
Second, the principle of fluid nozzles


The design of the two-fluid nozzle is varied, and the design of the picture is explained here.
This image shows the structure of two two-fluid nozzles, the outer mixing nozzle and the inner mixing nozzle.
External Mixing Nozzle: The liquid is sprayed through the liquid channel in the center, and the atomisation air (usually compressed air or nitrogen) is sprayed out at high speed from multiple channels in the periphery. Liquids and gases are mixed on the outside of the nozzle, and the high-velocity air stream tears the stream into tiny droplets, creating a fine, uniform atomization effect, usually in the form of a fan or conical spray.
The liquid and atomized gases in the internal mixing nozzle meet in the mixing zone inside the nozzle and are only ejected from the nozzle at a high speed after internal mixing. Since the mixing is already done in-house, the ejected droplets are smaller in size and atomized more evenly.

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The advantages of two fluids over single fluids?
1.Low consumption of chemical solution
2.The mechanical impact force is strong, it is easy to enter the complex structure, and the removal efficiency is high

3.The droplets are ultra-fine (about a few microns) and highly atomized