The Pre-vacuum Conveyor (Loadlock) and the Main Body of the Transfer Platform

0040-43884 PLATE CLAMP LID 300MM,EMAX

0040-45511 REV 003 COLD PLATE,300MM HDPCVD

 

The pre-vacuum conveyor is a transfer chamber for the atmosphere and vacuum, which is used to isolate the reaction chamber from direct contact with the outside atmosphere, so as to ensure the cleanliness of the reaction chamber and reduce the probability of contamination of the reaction chamber. When the front-end module needs to pick up and place the wafer to the pre-vacuum conveyor, it needs to be filled with nitrogen, the air pressure in the cavity is adjusted to the atmospheric state, and then the transmission valve of the pre-vacuum conveyor on the side of the front-end module is opened to pick and place the wafer; When picking up and placing wafers from the transfer chamber (part of the transfer platform) to the pre-vacuum transfer body, it is necessary to use a vacuum pump to pump out the gas in the pre-vacuum transfer body, adjust to the vacuum state, and then open the transfer valve on the other side of the pre-vacuum transfer body, and then carry out wafer pick-and-place.

The specific steps for the wafer to be transported in the transfer system are as follows: all doors are closed→ wafer loading port is opened, the door of the wafer cassette is opened→ the atmospheric manipulator grabs the wafer from the wafer boat of the cassette→ the wafer is placed on the aligner→ the wafer position is calibrated→ nitrogen gas is filled into the LoadLockA→ the door of the LoadLockA is opened→ the atmospheric manipulator places the wafer into the LoadLockA→ closes the door of the LoadLockA→ the LoadLockA vacuums → opens the door of the reaction chamber → The empty manipulator puts the wafer into the reaction chamber→ the reaction takes place→ after the reaction is completed, the reaction chamber is vacuumed→ the door of the transfer chamber is opened→ the vacuum manipulator moves the wafer to the transfer chamber→ closes the door of the reaction chamber→ opens the door of LoadLockB, → the vacuum manipulator moves the wafer to LoadLockB→ closes the door of LoadLockB→ LoadLockB is filled with nitrogen → opens the door of LoadLockB→ atmospheric manipulator moves the wafer out of LoadLockB → closes LoadLockB