Are Film Bulges And Cracks Caused By The Same Kind Of Stress？

0010-21827 8" Shield Assy

 

0021-35869 SHOWERHEAD

What are the types of stresses, and what kind of film problems can different kinds of stresses cause?Types of Internal Stresses?

There are many classifications of internal stress, and if we divide them according to the effect of the action, they can be divided into compressive stress and tensile stress.
As shown in the figure above, compressive stress is the compressive force of the film layer by the substrate, and the film layer has a tendency to shrink; The tensile stress is the tensile force of the film layer by the substrate, and the film has a tendency to expand.
What are the causes of film bulges and cracks?

As shown in the above figure, the effect of compressive stress, the film layer is squeezed by compressive stress, the distance between atoms or molecules decreases, and when the stress is too large, the overwhelmed molecules or atoms choose to develop in other directions, which is macroscopically manifested as a mound-like protrusion.

As shown in the figure above, the effect of tensile stress, the film is stretched, the distance between atoms or molecules increases, when the stress is too large, the voids between molecules or atoms can not be supplemented, which is macroscopically manifested as the cracking of the film.
What other problems can internal stress cause?
Compressive stress: wafer warping, film bubbling, etc
Tensile stress: wafer warping, film peeling, etc