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0020-34696 Slit Valve Liner
0020-34696 SLIT VALVE LINER . 2nd Source New. AMAT OXIDE ETCH 5000.
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0010-01712 5500 Tube Robot
0010-01712 5500 Tube Robot . 2nd Source New.
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0020-75851 VHP BUFFER LID
0020-75851 VHP BUFFER LID. 2nd Source New.
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0040-35057 REV.C WELDMENT,SLIT VALVE INSERT,PROCESS CHAMBER
0040-35057 REV. C Weldment Slit Valve Insert Process Chamber 2nd Source New. 2nd Source New.
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0020-91291 Door Slit Liner,300mm Emax
0020-91291 DOOR SLIT LINER,300MM eMAX . 2nd Source New.
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0040-50414 Door Slit Valve Waffle-less 200 Emax
0040-50414 DOOR SLIT VALVE WAFFLE-LESS 200 EMAX . 2nd Source New. AMAT CENTURA EMAX.
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0021-06092door Slit Liner
0021-06092DOOR SLIT LINER . 2nd Source New. AMAT OXIDE ETCH 5000.
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0020-34445 Blocker Plate Dxzg
0020-34445 BLOCKER PLATE DXZG . 2nd Source New. AMAT P5000 CVD.
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0020-30797 Perforated Plate Shower Head
0020-30797 PERFORATED PLATE SHOWER HEAD . 2nd Source New. AMAT P5000 CVD.
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0010-13927 Pedestal Lift Assembly Preclean
0010-13927 PEDESTAL LIFT ASSEMBLY PRECLEAN . 2nd Source New. AMAT Endura 5500 PVD.
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0040-20313 HOOP LIFT 6" WELDMENT
0040-20313 HOOP LIFT 6 WELDMENT . 2nd Source New. AMAT Endura 5500.
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0020-24018 PIN ANTENNA PCII POLI SI
0020-24018 PIN ANTENNA PCII POLI SI . 2nd Source New.
WEBBonded Slit Valve Doors Increase Wafer Production in HDPCVD Processing. Valve Seal. perfluoroelastomer. Contact Us. Greene Tweed Kulpsville, PA, USA. Tel: Fax:...
WEBBonded Slit Valve Door. ENGINEERED COMPONENTS The Bonded Slit Valve Door or “BSV” increases the life expectancy and performance of the door’s seal during semiconductor processing. Made from Greene,...
WEBSlit valve door. United States Patent 5579718. Abstract: An improved slit valve door for sealing an aperture in the wall of a semiconductor process chamber. The slit valve door consists of an...
WEBV77 Series: Rectangular Transfer Valve (Slit Valves) - Door. Applications. Plasma Etch, CVD, Sputter Deposition; Manufacturing of solar panels; Semiconductor processing; LCD/flat panel processes;...
WEBBonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and...
WEBSeals, unlike a transfer valve, only one vacuum chamber for loading or processing. The other side of the door is therefore always under atmospheric pressure. All VAT solutions are tailored to the...


