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0020-34696 Slit Valve Liner
0020-34696 SLIT VALVE LINER . 2nd Source New. AMAT OXIDE ETCH 5000.
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0010-37264 Cooldown Chamber Multi Slot Ass'y
0010-37264 Cooldown Chamber Multi Slot Ass'y . 2nd Source New.
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0040-35057 REV.C WELDMENT,SLIT VALVE INSERT,PROCESS CHAMBER
0040-35057 REV. C Weldment Slit Valve Insert Process Chamber 2nd Source New. 2nd Source New.
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0020-28346 8"CLAMP RING
0020-28346 8CLAMP RING . 2nd Source New. Endura 5500 PVD.
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0020-29202 SMF DURA TTN-SST 10 401ARS 6" Clamp Ring
0020-29202 SMF DURA TTN-SST 10 401ARS 6 Clamp Ring . 2nd Source New. Endura 5500 PVD.
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0020-91291 Door Slit Liner,300mm Emax
0020-91291 DOOR SLIT LINER,300MM eMAX . 2nd Source New.
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0040-50414 Door Slit Valve Waffle-less 200 Emax
0040-50414 DOOR SLIT VALVE WAFFLE-LESS 200 EMAX . 2nd Source New. AMAT CENTURA EMAX.
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0021-06092door Slit Liner
0021-06092DOOR SLIT LINER . 2nd Source New. AMAT OXIDE ETCH 5000.
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0020-34694 Liner, Gdp, R2 Oxidegeco
0020-34694 LINER, GDP, R2 OXIDEGECO. 2nd Source New. ETCH 5000.
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0021-36743 Dps Poly Lower Chamber
0021-36743 DPS POLY LOWER CHAMBER . 2nd Source New. AMAT Centura 5200 DPS POLY.
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0040-31942 Chamber Body, Etch, Oxide, Side Gas Feed
0040-31942 CHAMBER BODY, ETCH, OXIDE, SIDE GAS FEED . 2nd Source New. AMAT Centura 5200 MXP+.
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0040-09001chamber Body, Standard 4-6"
0040-09001Chamber Body, Standard 4-6 . 2nd Source New. AMAT CVD.
WEBBonded Slit Valve Doors Increase Wafer Production in HDPCVD Processing. Valve Seal. perfluoroelastomer. Contact Us. Greene Tweed Kulpsville, PA, USA. Tel: Fax:...
WEBBonded Slit Valve Door. ENGINEERED COMPONENTS The Bonded Slit Valve Door or “BSV” increases the life expectancy and performance of the door’s seal during semiconductor processing. Made from Greene,...
WEBSlit valve door. United States Patent 5579718. Abstract: An improved slit valve door for sealing an aperture in the wall of a semiconductor process chamber. The slit valve door consists of an...
WEBV77 Series: Rectangular Transfer Valve (Slit Valves) - Door. Applications. Plasma Etch, CVD, Sputter Deposition; Manufacturing of solar panels; Semiconductor processing; LCD/flat panel processes;...
WEBBonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and...
WEBSeals, unlike a transfer valve, only one vacuum chamber for loading or processing. The other side of the door is therefore always under atmospheric pressure. All VAT solutions are tailored to the...


