0020-33806 Upper Chamber Dps + Poly
2nd Source New
AMAT Centura 5200 DPS POLY
Products Description
The 0020-33806 UPPER CHAMBER DPS + POLY 2nd Source New is a top-of-the-line replacement part designed for use in DPS metal detectors. Made of high-quality materials, this upper chamber is built to withstand even the toughest environments and provide reliable metal detection capabilities. Its innovative design incorporates a durable poly material, ensuring that the chamber remains lightweight and easy to transport, while also providing excellent protection against harsh conditions and impacts. Whether you're a metal detection professional or an enthusiast, this premium quality replacement part is an essential part of your DPS metal detector's toolkit. Ideal for a range of applications, from industrial to recreational, the 0020-33806 UPPER CHAMBER DPS + POLY 2nd Source New is a smart investment for those looking for a dependable and high-performing replacement part.
The Centura 5200 platform is AMAT's automated multi-chamber equipment platform that can be installed with up to 6 chambers. These cavities include etching cavities such as DPS Poly(0020-33806), DPS Metal(0040-02544), eMax, Super-E, MxP and MxP+, which are suitable for etching silicon oxide, silicon nitride, polysilicon, silicon and metal materials. In addition, the platform includes CVD cavities such as DxZ, CxZ, TxZ, and WxZ, which are suitable for the chemical vapor deposition of dielectric materials such as silicon oxide, silicon nitride, and metals TiN and W12.
The Centura 5200 platform has a high space utilization and stable transfer platform, and the optional VHP transfer arm can improve equipment utilization, which is suitable for large-scale production lines. The platform is also equipped with a robust RF system and gas system, which is compatible with the development of a wide range of processes. These features make the Centura 5200 platform excellent in semiconductor manufacturing, suitable for handling and processing a wide range of materials 12.
0020-33806 Upper Chamber Dps + Poly is a reaction vessel for Poly eth reactions installed on the Centura 5200 etch platform, which is used in the following processes:
STEP1:BT(Break Through) CF4 CF4 IS MAINLY USED IN STEP1 TO REMOVE A NATURAL OXIDE LAYER FROM THE SURFACE OF THE POLY (0020-33806)
STEP2:ME(Main Etch)(0020-33806)
In general, CL2 and HBr are mainly used for POLY-Si etching, where CL2 is the main reaction gas and HBr is the second reactant. HBr not only reacts with Si to form non-volatile SiBrx, which is deposited on the side wall of POLY-SI to effectively shield transverse corrosion, but also reacts with photoresist to form polymers, protect photoresists, and improve the selection ratio of polysilicon to photoresist. CL atoms react with SI to form volatile SiCLx compounds, and the reaction equation is:
Si + XCL → SiCLx
Si + XBr → SiBrx
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Quality Control
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We have a strict quality control system, professional QC team.
Custom Packaging Service
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No matter the inner packing or the outer carton.
We will ensure hard and safe packaging.
Quick Response
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All requests will be reply within 24 hours.
How Long I Can Get The Feedback After We Sent The Enquiry?
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We will reply you within 24 hours in working day.
Can You Do Our Design?
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Of course, your customized design is available.
Can You Make Our Design For The Package?
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Yes, please send us the design you need, we will value the price and make the exact same package basing on your design. MOQ 1000pcs.
What's The Universal Lead-time For Order Delivery?
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Small production: 7-10 days. Mass production: 30-90 days or basing on your qty.
What Kind Of Shipping Do You Have?
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Shipping Method:
For small qtty will be shipped by courier door to door e.g: DHL, UPS, EMS, FEDEX IE, FEDEX IP, TNT (shipping days 3-4 days).
For bigger qtty will be shipped by sea shipment to your pointed nearest seaport (shipping days 1 month).
What Can You Get From Us?
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Good service (after-sales services, fast delivery) Professional business consultation.
Do You Deal With Urgent Orders?
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Of course, your customized design is available.
I Bought From You Once. Can I Have A Special Offer This Time?
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Contact for details. We do value our customers; we can and will offer you good price. :)
How The Product Pricing And How To Consult Prices?
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We pricing the products according to the raw material, transportation fee, reasonable profit and etc.
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