0200-20210 INSERT, DOUBLE RF CONNECTOR, VECTRA IMP

Part Number: 0200-20210

Type: INSERT, DOUBLE RF CONNECTOR

Series/Applicable Equipment: VECTRA IMP (may be used in ion implantation or plasma treatment equipment)

- Key Features & Functions

1. Designed for: - For radio frequency (RF) signal transmission, supports high-frequency power coupling, and is suitable for plasma processes (e.g., etching, deposition, ion implantation) in semiconductor manufacturing. - Dual-connector design may be used for redundancy or high power distribution, ensuring signal stability and device reliability.

2. Material & Construction: - The conductor material may be high-purity copper or gold-plated copper to reduce signal loss and oxidation. - The insulation may be made of ceramic (Al₂O₃) or high-performance polymers to ensure high temperature resistance and dielectric properties. - May contain (liquid crystal polymer, LCP) materials that provide excellent chemical resistance and dimensional stability.

3. Compatibility: - Designed for IMP series equipment (may be associated with ion implantation or plasma-enhanced chemical vapor deposition (PECVD)). - SEMI compliant for use in high vacuum or harsh process environments.

4. Performance Parameters (Spec.) - Frequency Range: May support 13.56 MHz (standard industrial RF frequency) or higher.

- Power Handling Capability: Suitable for kilowatt (kW) RF power transfer.

- Contact resistance: Extremely low (<10 mΩ) ensures efficient energy transfer.

- Application Scenarios - Plasma Etch: Used for precise etching of wafer surfaces.

- Ion Implantation: Provides RF matching in high-energy ion beam systems.

- Chemical Vapor Deposition (CVD/PECVD): Plasma excitation that maintains stability in thin film deposition processes.

- Maintenance & Installation Precautions - Anti-Contamination: Installation should be carried out in a clean room environment to avoid particle contamination.

- Torque control: Torque tools should be used in the connector installation according to specifications to avoid damage caused by over-tightening. - Periodic inspections: Check contacts for oxidation or wear to ensure signal integrity.

Hot Tags: 0200-20210 insert, double rf connector, vectra imp, China 0200-20210 insert, double rf connector, vectra imp suppliers, factory, 0020 30797 Perforated Plate Shower Head 2nd Source New, Blocker Faceplate, 0040 50414 Door Slit Valve Waffle less 200 Emax 2nd Source New, 0021 36743 Dps Poly Lower Chamber 2nd Source New, 19 024277 01 Heater 8inch 6pcs 2nd Source New, Lift Assy