0020-26583 6" Shutter Disk1

# Product Overview

Part Number: 0020-26583

Type: Shutter Disk1 (Shutter Disc Assembly)

Size: 6 inches (150mm)

Applicable Equipment: May be used in PVD (Physical Vapor Deposition) or CVD (Chemical Vapor Deposition) equipment

# Key Features & Functions

Core functions: - As a mechanical shutter assembly in a vacuum chamber to control the start and stop of material deposition

- Physical isolation during the process to prevent cross-contamination or unintended deposition

- Typical application in the transfer module of a multi-chamber integrated device

Material & Construction:

- Base Material:

• Stainless steel (316L) or titanium alloy (Ti6Al4V) body

• Special coatings (e.g. Al₂O₃ or CrN) may be used on the surface for enhanced wear resistance

- Kinematics:

• Precision bearing guidance system

• Ferrofluidic seal for vacuum integrity - Position Detection:

• Integrated Hall sensor or optical encoder

Technical Parameters:

| Parameter | Specifications |

| Vacuum Compatibility | ≤10⁻⁸ Torr |

| Operating temperature | -20℃~300℃ |

| Cycle Life | >500,000 times |

| Positioning accuracy | ±0.1mm |

System Integration: - Works in tandem with the robot of the Endura platform

- Receives PLC control signals via the I/O module of the device

--- # Typical Application Scenarios

- Metallic PVD process:

• Isolation of different targets during TiN/TaN deposition

- ALD Equipment:

• Precise control of precursor exposure time

- Equipment maintenance mode:

• Protect the process chamber during wafer handling

--- # Maintenance & Troubleshooting

Preventive Maintenance:

- Check every 3 months:

• Surface deposit accumulation

• Bearing lubrication condition (with special vacuum grease)

Common faults: - Motion hysteresis:

• Clean the rails and replenish the lubricant

- Abnormal position signal:

• Check the sensor wiring or replace the encoder

Replacement Points:

- Class 100 operation required

- After replacement, perform the following: • Vacuum leak test (≤1×10⁻⁹ Torr· L/s) • Motion trajectory calibration

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