0020-26823 6" Hot ALCU SHIELD

# Product Overview

Part Number: 0020-26823

Type: Hot ALCU SHIELD

Size: 6 inches (150mm)

Applicable process: PVD (Physical Vapor Deposition) or High Temperature Heat Treatment Equipment

--- # Key Features & Functions

Core Functions:

- Acts as a protective shield in high-temperature process environments to prevent the deposition material from contaminating the inside of the chamber

- Specially designed for aluminium (Al) or copper (Cu)-based processes to optimize film deposition uniformity - Maintains structural stability at high temperatures (≤450°C)

Materials & Special Treatments:

- ALCU Alloy Matrix:

• Proprietary aluminum-copper alloy formulation (may contain Si/Mg trace elements)

• Strengthened with T6 heat treatment - Surface Treatment:

• Micro Arc Oxidation (MAO) Coating

• or Anodized (Hard Anodized, ≥50μm) - Thermal Management Design:

• Integrated cooling channel interface (optional)

Technical Specifications:

| Parameter | Metrics |

| Maximum operating temperature | 450°C |

| coefficient of thermal expansion | 23.6×10⁻⁶/°C |

| Surface roughness | Ra ≤0.8μm |

| Vacuum Compatibility | ≤5×10⁻⁸ Torr |

Device Integration:

- Compatible with Endura 5500 PVD system

- Designed to match standard 6-inch carriers

--- # Typical Application Scenarios

- Al/TiN multilayer deposition:

• Prevents aluminum diffusion from contaminating the cavity

- Copper interconnect process:

• Controlling copper redeposition issues

- High temperature annealing process:

• Protects sensitive sensor components

--- # Maintenance & Handling Specifications

Cleaning cycles:

- Every 2000 wafer starts required:

• Dry Ice Blast Cleaning (CO₂ blasting)

• Or Ultrasonic Cleaning (Special Solvent Formulation)

Key Checkpoints:

- Surface coating integrity (no spalling/cracking)

- Thermal deformation (≤0.05mm flatness required)

Replacement Criteria:

- Must be replaced when:

• Substrate exposure due to coating wear

• Thermal deformation affecting component fit tolerances ---

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