0020-26588 SHIELD 8“

Part Number: 0020-26588

Type: SHIELD (Process Chamber Protective Shielding Unit)

Size: 8 inches (200mm)

Applicable process: PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) or Etch (Etch) equipment

--- # Key Features and Functions

Core Functions:

- Acts as a protective barrier inside the vacuum chamber to prevent process by-products from being deposited in sensitive areas

- Optimizes plasma distribution and improves the uniformity of thin film deposition or etching

- Protects components inside the chamber from high temperatures and corrosive gases

Materials & Special Treatments:

- Body Material:

• Stainless steel (316L) or aluminum alloy (6061-T6)

• Optional Ceramic coating (Al₂O₃/Y₂O₃) Enhanced corrosion resistance

- Surface Treatment:

• Bead Brushed or Electropolished

• Some models may have Black Oxide to reduce light reflection

- Structural Design:

• Modular and detachable design for easy maintenance

• Integrated cooling channel (some models)

Technical Specifications:

| Parameter | Metrics | |---|---|

| Operating temperature | ≤350°C |

| Vacuum Compatibility | ≤1×10⁻⁷ Torr |

| Surface roughness | Ra ≤1.0μm |

| Plasma resistant | >5000 RF hours |

Device Compatibility:

- Compatible with Endura, Centura, or Producer series devices

- Suitable for 8" (200mm) wafer processes

--- # Typical Application Scenarios

- Metallic PVD (e.g. Al, Cu, TiN deposition):

• Prevents target sputtering from contaminating the cavity wall - High-k CVD:

• Reduced by-product particle build-up - Dielectric/ Metal Etch:

• Protecting RF Electrodes from Corrosion

--- # Maintenance & Installation Specifications

Cleaning & Inspection: - Regular cleaning (every 1500 wafer starts):

• Use dry ice cleaning (CO₂ blasting) or dust-free wipes + IPA - Key checks:

• Whether the surface coating is peeling off

• Whether there is thermal deformation or cracks

Replacement Criteria:

- Replacement is required in the following cases:

• Severe wear of the coating (exposure of the base metal)

• Deformation of more than 0.1mm (affecting tightness)

Installation Precautions:

- Must be operated in a Class 100 clean environment

- Tighten the screws with a specified torque (typically 5-8 N·m) to avoid overtightening and causing deformation

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