0020-29343 Clamp Shield Dark SPACE

Part Number: 0020-29343

Type: Clamp Shield Dark SPACE Applicable Process: May be used in PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) or Etch equipment ---

- Key Features and Functions

Designed for: - Fixtures or shielding inside vacuum chambers to prevent plasma interference or particle contamination.

- "Dark SPACE" design may refer to a low-reflectivity surface treatment that reduces stray light or secondary electron emissions and improves process stability.

Material and Structure: - Body material: may be made of stainless steel (SS), aluminum alloy (Al) or special coatings (e.g. ceramic, DLC) to resist high temperatures and plasma attack.

- Surface Treatment: May be anodized, bead blasted, or black oxide to reduce reflectivity and enhance corrosion resistance.

- Structural design: may include a Clamp Mechanism for easy maintenance and replacement.

Compatibility: - Refer to the device manual for specific device models (such as Endura, Centura, or Producer series).

- Suitable for high vacuum (≤10⁻⁶ Torr) and high temperature (≤300°C) environments. 4. Performance

Advantages: - Reduced particle contamination: The shielding design prevents sputtering material from being deposited into non-target areas.

- Improved process uniformity: Dark space treatment reduces uneven film thickness due to light reflection.

- Long life: Plasma-resistant materials extend component replacement intervals. -Application Scenarios - PVD cavity: Fixing the target or shielding the uncoated area.

- Etching process: Protects sensitive components from plasma damage.

- CVD Reaction Chamber: Prevents by-products from being deposited in critical areas.

-Maintenance & Installation Precautions

- Clean Operation: Installation should be carried out in a Class 100 or higher clean environment to avoid contamination.

- Periodic inspections: Check the surface coating for peeling or plasma erosion, and replace if necessary.

- Torque specification: Tighten with a torque wrench according to requirements to avoid deformation caused by excessive stress.

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