0040-01973 REV.004 CHAMBER BOTTOM RADIANCE 200MM RTPw

The 0040-01973 REV.004 CHAMBER BOTTOM is a crucial part used in the Radiance 200mm RTP system, one of the key tools used in the industry for rapid thermal processing.The chamber bottom is responsible to create a high-temperature environment to facilitate semiconductor processing. It is constructed from high-quality materials that can withstand the high temperatures and harsh chemical environments involved in the manufacturing process. One of the key features that sets the chamber bottom apart is its design, which has been optimized to ensure uniform heating across the entire wafer surface. This is essential for achieving consistent processing results.

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